23 January 1995 X-ray investigations of supersmooth surfaces
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Proceedings Volume 2453, X-Ray Optics and Surface Science; (1995) https://doi.org/10.1117/12.200271
Event: X-ray Optics and Surface Science, 1994, none, Russian Federation
Abstract
The possibilities of X-ray scattering methods are demonstrated for the quantitative study of supersmooth surface microgeometry. It is shown that the model of a surface which takes into account layered inhomogeneities near a surface enables one to obtain better agreement between theory and experiment in comparison with the step-like model of a surface which widely used elsewhere.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor V. Kozhevnikov, Igor V. Kozhevnikov, Victor E. Asadchikov, Victor E. Asadchikov, B. M. Alaudinov, B. M. Alaudinov, Albert Yu. Karabekov, Albert Yu. Karabekov, Alexander V. Vinogradov, Alexander V. Vinogradov, } "X-ray investigations of supersmooth surfaces", Proc. SPIE 2453, X-Ray Optics and Surface Science, (23 January 1995); doi: 10.1117/12.200271; https://doi.org/10.1117/12.200271
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