Modern technologies for optical components with special dimensions

Teodor Necsoiu; Roxana N. Radvan; Roxana Savastru; Dan Savastru; Eugene O. Curatu

doi:10.1117/12.203494

8 March 1995 Modern technologies for optical components with special dimensions

Teodor Necsoiu, Roxana N. Radvan, Roxana Savastru, Dan Savastru, Eugene O. Curatu

Proceedings Volume 2461, ROMOPTO '94: Fourth Conference in Optics; (1995) https://doi.org/10.1117/12.203494
Event: ROMOPTO '94: 4th Conference on Optics, 1994, Bucharest, Romania

Abstract

The paper proposes an optical arrangement for the control in real-time of the laser spot position in lithography techniques. The arrangement is adequately for the small installation, especially used in research or teaching activities.

Citation Download Citation

Teodor Necsoiu, Roxana N. Radvan, Roxana Savastru, Dan Savastru, and Eugene O. Curatu "Modern technologies for optical components with special dimensions", Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); https://doi.org/10.1117/12.203494

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