Deposition of thin polymer films by pulsed excimer laser ablation

Martin Metal; Vladimir Myslik; Miroslav Jelinek

doi:10.1117/12.203612

1 March 1995 Deposition of thin polymer films by pulsed excimer laser ablation

Martin Metal, Vladimir Myslik, Miroslav Jelinek

Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203612
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany

Abstract

Deposition of thin Polytetrafluorethylene (PTFE) film by laser ablation deposition (LAD) technique is briefly described. The method utilization, transport conditions, and optimal setup are presented. The paper also deals with the methods of prepared thin films characterization (scanning electron microscopy, x-ray diffraction, and Fourier transform infrared spectroscopy) and comments on all data achieved from all characterization measurements.

Citation Download Citation

Martin Metal, Vladimir Myslik, and Miroslav Jelinek "Deposition of thin polymer films by pulsed excimer laser ablation", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); https://doi.org/10.1117/12.203612

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