1 March 1995 Production of diamond-like films by laser ablation in the presence of residual gas in a reaction chamber
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Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203608
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany
Abstract
Diamond-like films were produced by laser ablation of glass-carbon target in the presence of residual gas (Ar) in a reaction chamber. It appears that the band gap value of the films deposited in this case is more than 20% greater than that of the films deposited at high vacuum. This influence of a gas on optical properties of the produced coatings was explained in the framework of a simple mechanical model.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valerie A. Astapenko, Valerie A. Astapenko, Oleg E. Sidoryuk, Oleg E. Sidoryuk, } "Production of diamond-like films by laser ablation in the presence of residual gas in a reaction chamber", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203608; https://doi.org/10.1117/12.203608
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