31 March 1995 Laser processing of YBCO superconducting thin films
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Proceedings Volume 2502, Gas Flow and Chemical Lasers: Tenth International Symposium; (1995) https://doi.org/10.1117/12.204986
Event: Gas Flow and Chemical Lasers: Tenth International Symposium, 1994, Friedrichshafen, Germany
Abstract
Superconducting Y1Ba2Cu3O7 thin films were prepared by in-situ oxygen plasma-assisted XeCl excimer laser deposition. A multistep superfast CO2 laser annealing was investigated as a method of modification of the Y1Ba2Cu3O7 thin films on Si. It was revealed that cw CO2 laser heating of substrate surface may be also a method for reduction of particulate density. The buffer layers such as Ba(Sr)TiO3 and YSZ(111) were successfully experimented for preparation of good superconducting thin films. It is shown that N2 laser ablation may be a proper technique for patterning Y1Ba2Cu3O7 thin films. The films were characterized by EDAX, SEM, XRD and Raman spectroscopy.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rumen I. Tomov, Rumen I. Tomov, Valery S. Serbezov, Valery S. Serbezov, Peter A. Atanasov, Peter A. Atanasov, } "Laser processing of YBCO superconducting thin films", Proc. SPIE 2502, Gas Flow and Chemical Lasers: Tenth International Symposium, (31 March 1995); doi: 10.1117/12.204986; https://doi.org/10.1117/12.204986
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