20 September 1995 Optoelectronical gas sensors based on surface plasmon resonance in Si-structure
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Proceedings Volume 2506, Air Pollution and Visibility Measurements; (1995) https://doi.org/10.1117/12.221004
Event: European Symposium on Optics for Environmental and Public Safety, 1995, Munich, Germany
The concept of surface plasmon resonance chemical sensors based on Si substrate is developed which combines a number of advantages of both optical and microelectronical approaches to investigate gaseous media. This type of the gas sensor has been made and tested for the first time. A reversible response to ntirogen dioxide at the level of ppm concentrations has been recorded.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petr I. Nikitin, Petr I. Nikitin, Mikhail V. Valeiko, Mikhail V. Valeiko, Anatoli A. Beloglazov, Anatoli A. Beloglazov, } "Optoelectronical gas sensors based on surface plasmon resonance in Si-structure", Proc. SPIE 2506, Air Pollution and Visibility Measurements, (20 September 1995); doi: 10.1117/12.221004; https://doi.org/10.1117/12.221004


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