Optoelectronical gas sensors based on surface plasmon resonance in Si-structure

Petr I. Nikitin; Mikhail V. Valeiko; Anatoli A. Beloglazov

doi:10.1117/12.221004

20 September 1995 Optoelectronical gas sensors based on surface plasmon resonance in Si-structure

Petr I. Nikitin; Mikhail V. Valeiko; Anatoli A. Beloglazov

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Proceedings Volume 2506, Air Pollution and Visibility Measurements; (1995) https://doi.org/10.1117/12.221004
Event: European Symposium on Optics for Environmental and Public Safety, 1995, Munich, Germany

Abstract

The concept of surface plasmon resonance chemical sensors based on Si substrate is developed which combines a number of advantages of both optical and microelectronical approaches to investigate gaseous media. This type of the gas sensor has been made and tested for the first time. A reversible response to ntirogen dioxide at the level of ppm concentrations has been recorded.

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Petr I. Nikitin, Petr I. Nikitin, Mikhail V. Valeiko, Mikhail V. Valeiko, Anatoli A. Beloglazov, Anatoli A. Beloglazov, } "Optoelectronical gas sensors based on surface plasmon resonance in Si-structure", Proc. SPIE 2506, Air Pollution and Visibility Measurements, (20 September 1995); doi: 10.1117/12.221004; https://doi.org/10.1117/12.221004

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