21 September 1995 Ellipsometric measurements for thin-film-based sensor systems
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Proceedings Volume 2509, Smart Structures: Optical Instrumentation and Sensing Systems; (1995) https://doi.org/10.1117/12.221105
Event: European Symposium on Optics for Environmental and Public Safety, 1995, Munich, Germany
Abstract
The application of a highly birefringent fiber polarization modulation technique for ellipsometric measurements on sol-gel thin films is described. The ability of the system to determine the ellipsometric parameters of thin films is demonstrated. The system is then used to monitor the ellipsometric parameters of thin films on exposure to a perturbing environment of humidity and pressure. The potential of the system for application in chemical sensor systems is indicated and discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ratchapak Chitaree, Ratchapak Chitaree, V. Murphy, V. Murphy, K. Weir, K. Weir, Andrew W. Palmer, Andrew W. Palmer, Kenneth T. V. Grattan, Kenneth T. V. Grattan, Brian D. MacCraith, Brian D. MacCraith, } "Ellipsometric measurements for thin-film-based sensor systems", Proc. SPIE 2509, Smart Structures: Optical Instrumentation and Sensing Systems, (21 September 1995); doi: 10.1117/12.221105; https://doi.org/10.1117/12.221105
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