3 July 1995 High-speed mask EB graphical image browser
Author Affiliations +
With mask data processing becoming increasingly complex, there is a growing need for mask data verification. An EB graphical image browser was developed to support mask data verification and was designed to allow high speed visualization of large data volumes such as typically found in ULSI designs. The EB browser uses an intermediate format in order to support multiple EB data formats. The software implementation allows for portability between computer platforms commonly used in a CAD framework.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert Veltman, Robert Veltman, Itsuji Ashida, Itsuji Ashida, Kunihiko Tsuboi, Kunihiko Tsuboi, } "High-speed mask EB graphical image browser", Proc. SPIE 2512, Photomask and X-Ray Mask Technology II, (3 July 1995); doi: 10.1117/12.212791; https://doi.org/10.1117/12.212791


Image quality: a tool for no-reference assessment methods
Proceedings of SPIE (January 24 2011)
Advanced die-to-database reticle machine for 64-Mbit DRAMs
Proceedings of SPIE (November 02 1994)
High-performance image processing on the desktop
Proceedings of SPIE (April 14 1996)
Universal pattern data format
Proceedings of SPIE (February 14 1994)
Medical Image Processing On An Enhanced Workstation
Proceedings of SPIE (June 26 1988)

Back to Top