3 July 1995 Recent advances in mask-making technology at AT&T
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Proceedings Volume 2512, Photomask and X-Ray Mask Technology II; (1995); doi: 10.1117/12.212799
Event: Photomask Japan 1995, 1995, Kanagawa, Japan
Abstract
As the design rules to make integrated circuits with features less than 0.25 micrometers are emerging, it appears that conventional deep UV photolithography will not be able to support these new generation IC technologies. There are however other possibilities such as enhanced optics, proximity x-ray and projection electron-beam which extend the state of lithography below 0.25 micrometers . AT&T is in a unique position to evaluate these new technologies since we have active programs in each of these areas. It is clear that the success of any of these new techniques is directly connected to the ability to manufacture the corresponding mask.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Regine G. Tarascon, "Recent advances in mask-making technology at AT&T", Proc. SPIE 2512, Photomask and X-Ray Mask Technology II, (3 July 1995); doi: 10.1117/12.212799; https://doi.org/10.1117/12.212799
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KEYWORDS
Photomasks

X-rays

Charged-particle lithography

Optical proximity correction

Etching

Inspection

Lithography

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