20 June 1995 Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing
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Abstract
Polished silicon crystals, lacquered aluminum foil, and float glass substrates with respect to surface roughness. Co/C multilayers were then deposited by electron-beam evaporation with in situ monitoring x-ray signal and ion polishing (Kr+) for the metal layer. The specular as well as the transverse scan have demonstrated different qualities, influenced by the different substrates. The investigations were performed with both hard x-ray (8.05 keV) as well as soft x-ray (0.25 keV). The reflectivity varies up to factor 3 between the best and the worst of these substrates. The results of these investigations and a comparison between the coating performances are discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Salim Abdali, Finn Erland Christensen, Eberhard Adolf Spiller, Eric Louis, Harm-Jan Voorma, "Hard and soft x-ray study of the correlation between substrate quality and multilayer performance for Co/C coating produced by electron beam evaporation using ion polishing", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212620; https://doi.org/10.1117/12.212620
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