20 June 1995 Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite
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Abstract
We carried out experiments to determine the optimum parameters for the production of multilayer x-ray mirrors for the lambda equals 4.4 - 7.1 nm range using electron beam evaporation and ion-polishing. We report on the deposition of Co/C and Ni/C coatings, of which we polished the metal layers with Kr+- and Ar+- ions of 300, 500, and 1000 eV. We examined the effect of different polishing parameters on the smoothening of the Co- and Ni-layers. The in-situ reflectivity of lambda equals 3.16 nm during deposition and the ex-situ grazing incidence reflectivity of Cu-K(alpha ) radiation (lambda equals 0.154 nm) were used to analyze the coatings. We found optimum performance of the mirrors when applying polishing for 40 s with 500 eV Kr+-ions at an angle of 20 degrees and an ion beam current of 20 mA. Using these parameters, we produced Co/C multilayer coatings on forty flat super-polished 6 multiplied by 6 cm2 Si (111) crystals for the Objective Crystal Spectrometer on the Russian Spectrum Rontgen Gamma satellite. The coatings on the flight crystals have a period Lambda of 3.95 plus or minus 0.02 nm and a reflectivity of more than 8% averaged over s- and p-polarization over the entire wavelength range of interest. We present a detailed analysis of the coatings on the crystals.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric Louis, Eric Louis, Eberhard Adolf Spiller, Eberhard Adolf Spiller, Salim Abdali, Salim Abdali, Finn Erland Christensen, Finn Erland Christensen, Harm-Jan Voorma, Harm-Jan Voorma, Norbert B. Koster, Norbert B. Koster, Peter K. Frederiksen, Peter K. Frederiksen, Charles Tarrio, Charles Tarrio, Eric M. Gullikson, Eric M. Gullikson, Fred Bijkerk, Fred Bijkerk, } "Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212588; https://doi.org/10.1117/12.212588
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