20 June 1995 Multilayer x-ray optics with enhanced thermal and radiation stability
Author Affiliations +
Thermal stability of structure, period and x-ray reflectivity of multilayer mirrors for the whole range of soft x rays with wavelengths 1 - 30 nm were studied in wide temperature range 350 - 1400 K by x-ray scattering and cross-sectional electron microscopy methods. Irradiation by He+ particles with energy 30 keV and doses 1 multiplied by 1019 -4 multiplied by 1020 ion/m2 and by 10 MeV-electrons with dose up to 10-4 Gray was carried out for evaluation of radiation stability of Mo/Si and MoSi2Si multilayer mirrors. It was shown that thermodynamic equilibrium of layer materials at their interfaces and stabilization of layer structure by impurities and heat treatment are an effective approach to multilayer x-ray optics with enhanced thermal and radiation stability.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anatoli I. Fedorenko, Anatoli I. Fedorenko, V. V. Kondratenko, V. V. Kondratenko, E. A. Bugaev, E. A. Bugaev, Yurii P. Pershin, Yurii P. Pershin, A. G. Ponomarenko, A. G. Ponomarenko, O. V. Poltseva, O. V. Poltseva, I. A. Kopylets, I. A. Kopylets, S. A. Yulin, S. A. Yulin, E. N. Zubarev, E. N. Zubarev, } "Multilayer x-ray optics with enhanced thermal and radiation stability", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212589; https://doi.org/10.1117/12.212589


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