20 June 1995 Schwarzschild microscope at the wavelength of 18 nm using a laser-produced plasma source
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Abstract
The design , construction and imaging experiments of a soft X-ray microscope which consists of acompact laser-produced plasma source (LPPS) , as well as a multilayer coated spherical condenser, and Schwarzschild optics are presented. The Schwarzschild optics was designed for numerical aperture of 0. 1 and magnification of 10. For the working wavelength of 18 nm calculations show that the resolution is expected to be 0.2im. We designed a 41 layer Mo/Si multilayer coatings of throughput centered at l8nm, and these coatings were deposited by magnetron sputtering. We put a Al/C multilayer filter in front of the image to block thelong wavelength radiation. The object on the primary experiments is a piece of Cu mesh of 55 pair lines/mm witha opening of 5m and bar width of 3im. The backlit mesh image were taken on Kodak X-ray film. The first lot of experiment data show that a spatial resolution better than 1im was obtained. Key words : Schwarzschild Optics , Soft X-Ray Microscope , Multilayer mirrors.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhanshan Wang, Jianlin Cao, Bo Chen, Yueying Ma, Junping Zhang, Xingdan Chen, "Schwarzschild microscope at the wavelength of 18 nm using a laser-produced plasma source", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); doi: 10.1117/12.212619; https://doi.org/10.1117/12.212619
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