16 October 1995 Broadband mirror for soft x-ray optics
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Abstract
Multilayer interference structures (MIS) consisting of alternating diamond-like layers with different parameters were investigated. The structures with periods from 68 Angstrom up to 21 angstrom were obtained by ion-plasma methods. Properties of diamond-like MIS and diamond-like films were studied by x-ray diffraction measurements in the range 1.54 angstrom - 11.8 angstrom and ESCA. The numerical computations of reflecting ability of multilayer diamond-like structures were carried out. The difference between experimental and theoretical results are discussed. It is shown experimentally the feasibility of creating wideband mirrors for the soft x-ray range using diamond-like layers with different electron densities.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pavel E. Kondrashov, Igor S. Smirnov, Helena Novoselova, Alexander M. Baranov, and V. V. Sleptsov "Broadband mirror for soft x-ray optics", Proc. SPIE 2517, X-Ray and EUV/FUV Spectroscopy and Polarimetry, (16 October 1995); doi: 10.1117/12.224930; https://doi.org/10.1117/12.224930
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