PROCEEDINGS VOLUME 2522
SPIE'S 1995 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION | 9-14 JULY 1995
Electron-Beam Sources and Charged-Particle Optics
SPIE'S 1995 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION
9-14 July 1995
San Diego, CA, United States
Electron-Beam Lithography
Proc. SPIE 2522, Electron-beam microcolumn technology and applications, 0000 (25 September 1995); doi: 10.1117/12.221566
Proc. SPIE 2522, Electron-optical design for the SCALPEL proof-of-concept tool, 0000 (25 September 1995); doi: 10.1117/12.221577
Proc. SPIE 2522, Large-field electron optics: limitations and enhancements, 0000 (25 September 1995); doi: 10.1117/12.221586
Proc. SPIE 2522, Thermal field emission sources and optics for Gaussian electron-beam lithography, 0000 (25 September 1995); doi: 10.1117/12.221595
Aberration Theory and Analysis
Proc. SPIE 2522, Aberration analysis of wide-angle deflectors and lenses by direct ray-tracing and comparison with conventional aberration theories, 0000 (25 September 1995); doi: 10.1117/12.221611
Proc. SPIE 2522, Dynamic correction of aberrations in focusing and deflection systems with shaped beams, 0000 (25 September 1995); doi: 10.1117/12.221617
Proc. SPIE 2522, Rigorous theoretical investigation of distortion in ion-projection noncathode systems, 0000 (25 September 1995); doi: 10.1117/12.221619
Optimization and Simulation Software
Proc. SPIE 2522, Some problems of mathematical simulation in optimization design of electrostatic image tubes, 0000 (25 September 1995); doi: 10.1117/12.221567
Proc. SPIE 2522, Simulation software BEAMISH for the design of charged-particle optical instruments, 0000 (25 September 1995); doi: 10.1117/12.221568
Proc. SPIE 2522, Improvements to the electrostatic lens optimization method SOEM, 0000 (25 September 1995); doi: 10.1117/12.221569
Proc. SPIE 2522, Primary expert system applied in design of electron-optical system, 0000 (25 September 1995); doi: 10.1117/12.221570
Proc. SPIE 2522, Theory of group applied to calculate field of multielectrode systems with symmetrical geometry of electrodes, 0000 (25 September 1995); doi: 10.1117/12.221571
Sources
Proc. SPIE 2522, New design for a field emission electron gun immersed in a magnetic lens field, 0000 (25 September 1995); doi: 10.1117/12.221572
Proc. SPIE 2522, Comparative study of supertips for electron field emitters, 0000 (25 September 1995); doi: 10.1117/12.221573
Proc. SPIE 2522, New MV-class generator, 0000 (25 September 1995); doi: 10.1117/12.221574
Proc. SPIE 2522, Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode, 0000 (25 September 1995); doi: 10.1117/12.221575
Electron-Optical Design
Proc. SPIE 2522, CRT electron-optical system, 0000 (25 September 1995); doi: 10.1117/12.221576
Proc. SPIE 2522, Immersion lenses for low-voltage SEM and LEEM, 0000 (25 September 1995); doi: 10.1117/12.221578
Proc. SPIE 2522, Optimized secondary electron collection in in-lens-type objective lens, 0000 (25 September 1995); doi: 10.1117/12.221579
Proc. SPIE 2522, Electrostatic lenses with corrected chromatic and spherical aberrations, 0000 (25 September 1995); doi: 10.1117/12.221580
Multipole Lenses, Energy Analyzers, Filters, and Sector Magnets
Proc. SPIE 2522, Pulsed magnetic quadrupole lenses, 0000 (25 September 1995); doi: 10.1117/12.221581
Proc. SPIE 2522, Improvement of sensitivity and depth resolution in conventional RBS and ERDA techniques using energy/momentum filters, 0000 (25 September 1995); doi: 10.1117/12.221582
Proc. SPIE 2522, Curvature of the effective field boundary of realistic sector magnets, 0000 (25 September 1995); doi: 10.1117/12.221583
Proc. SPIE 2522, Split shielding plates in electrostatic sector analyzers and Wien filters, 0000 (25 September 1995); doi: 10.1117/12.221584
Coulomb Interactions and Space Charge
Proc. SPIE 2522, Solution of electron optics problems with space charge in 2D and 3D, 0000 (25 September 1995); doi: 10.1117/12.221585
Electron-Optical Design
Proc. SPIE 2522, Saturated electron lens design using a second-order finite element method, 0000 (25 September 1995); doi: 10.1117/12.221587
Aberration Theory and Analysis
Proc. SPIE 2522, Retarding field optics with field-free sample, 0000 (25 September 1995); doi: 10.1117/12.221588
Electron-Optical Design
Proc. SPIE 2522, SEIII electrons in the scanning electron microscope: their production, detection, and effect on image quality, 0000 (25 September 1995); doi: 10.1117/12.221589
Multipole Lenses, Energy Analyzers, Filters, and Sector Magnets
Proc. SPIE 2522, Fringe-field-induced 12-pole component of magnetic quadrupole lenses, 0000 (25 September 1995); doi: 10.1117/12.221590
Proc. SPIE 2522, Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system, 0000 (25 September 1995); doi: 10.1117/12.221591
Focused Ion Beams
Proc. SPIE 2522, Use of two focusing modes on two-lens focused ion-beam column, 0000 (25 September 1995); doi: 10.1117/12.221592
Coulomb Interactions and Space Charge
Proc. SPIE 2522, Coulomb interactions in particle-beam systems, 0000 (25 September 1995); doi: 10.1117/12.221593
Proc. SPIE 2522, Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations, 0000 (25 September 1995); doi: 10.1117/12.221594
Proc. SPIE 2522, Calculation of aberrations of a space charge lens and its possible applications, 0000 (25 September 1995); doi: 10.1117/12.221596
Focused Ion Beams
Proc. SPIE 2522, Low-energy focused ion-beam system for direct deposition, 0000 (25 September 1995); doi: 10.1117/12.221597
Proc. SPIE 2522, Low-energy focused ion-beam system combined with molecular-beam epitaxy system for fabrication of 3D buried semiconductor structures, 0000 (25 September 1995); doi: 10.1117/12.221598
Proc. SPIE 2522, Limits on imaging resolution of focused ion-beam systems, 0000 (25 September 1995); doi: 10.1117/12.221599
Proc. SPIE 2522, Compensation for rapid contrast variations and correction for charging effects in scanning ion microscopy, 0000 (25 September 1995); doi: 10.1117/12.221600
Experimental Sources
Proc. SPIE 2522, Subcompact free-electron laser, 0000 (25 September 1995); doi: 10.1117/12.221601
Proc. SPIE 2522, Design and operation of the Compact Infrared Free-Electron Laser (CIRFEL), 0000 (25 September 1995); doi: 10.1117/12.221602
Proc. SPIE 2522, Radiation produced by relativistic electrons moving over a diffraction grating, 0000 (25 September 1995); doi: 10.1117/12.221603
User Facilities
Proc. SPIE 2522, Picosecond pump-probe using an FEL and synchrotron source, 0000 (25 September 1995); doi: 10.1117/12.221604
Proc. SPIE 2522, Short-wavelength light sources at Duke storage ring, 0000 (25 September 1995); doi: 10.1117/12.221605
Proc. SPIE 2522, NSLS source development laboratory, 0000 (25 September 1995); doi: 10.1117/12.221606
Theory
Proc. SPIE 2522, Self-consistent undulator radiation via Lienard-Wiechert fields, 0000 (25 September 1995); doi: 10.1117/12.221607
Proc. SPIE 2522, Design and application of coaxial wigglers in free-electron lasers, 0000 (25 September 1995); doi: 10.1117/12.221608
Electron-Beam Sources
Proc. SPIE 2522, Microwave measurements and beam dynamics simulations of the BNL/SLAC/UCLA emittance-compensated 1.6-cell photocathode rf gun, 0000 (25 September 1995); doi: 10.1117/12.221609
Proc. SPIE 2522, Entropy, reversible and irreversible emittance growth, 0000 (25 September 1995); doi: 10.1117/12.221610
Sources
Proc. SPIE 2522, Micromachined electron gun array (MEGA), 0000 (25 September 1995); doi: 10.1117/12.221612
Aberration Theory and Analysis
Proc. SPIE 2522, Realizing any specified image rotation in electrostatic and magnetic imaging, 0000 (25 September 1995); doi: 10.1117/12.221613
Optimization and Simulation Software
Proc. SPIE 2522, Simulation of electron-optical system in color monitor tube, 0000 (25 September 1995); doi: 10.1117/12.221614
Proc. SPIE 2522, Numerical techniques and software for static and dynamic image tubes design, 0000 (25 September 1995); doi: 10.1117/12.221615
Multipole Lenses, Energy Analyzers, Filters, and Sector Magnets
Proc. SPIE 2522, Transfer matrix of a narrow gap between two quadrupole lenses, 0000 (25 September 1995); doi: 10.1117/12.221616