Immersion lenses for low-voltage SEM and LEEM

Katsushige Tsuno; Nobuo Handa; Sunao Matsumoto

doi:10.1117/12.221578

25 September 1995 Immersion lenses for low-voltage SEM and LEEM

Katsushige Tsuno, Nobuo Handa, Sunao Matsumoto

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221578
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Spherical and chromatic aberration coefficients C_s and C_c of various immersion lenses for low voltage SEM and LEEM are calculated. The minimum values of magnetic immersion lens are C_s equals C_c equals 1 mm. For the combined electrostatic and magnetic lenses, those values are at most C_s equals 1 mm and C_c equals 0.7 mm, when the specimen is free from the electrostatic field. When the specimen is immersed in the electrostatic field, those values reduce to C_s equals 0.2 mm and C_c equals 0.1 mm at 1 kV.

Citation Download Citation

Katsushige Tsuno, Nobuo Handa, and Sunao Matsumoto "Immersion lenses for low-voltage SEM and LEEM", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221578

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