Translator Disclaimer
25 September 1995 Improvements to the electrostatic lens optimization method SOEM
Author Affiliations +
Abstract
Lens optimization can be based on the very fast approximate axial potential calculation of the Second Order Electrode Method (SOEM). In this method the free optimization parameters are the physical quantities of an electrostatic lens system. The optimization, to a merit function based on the optical properties of the lens, is within engineering constraints such as the maximum off-axis field between electrodes. Several improvements to the method have been brought into the program SOEM extending the class of electrostatic lenses that can be optimized. The off-axis geometrical aberrations and the chromatic magnification error can now be included in the merit function. The first and last electrodes can intersect the axis, thus allowing non-field-free spaces at the ends of the lens. Electrode parameters (radii/length/gaps/potential) can be required to be equal giving greater control over the lens configuration freedom in the optimization process.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jim Edmond Barth, H. W. G. van der Steen, and Jaroslav Chmelik "Improvements to the electrostatic lens optimization method SOEM", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221569
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
Back to Top