25 September 1995 Primary expert system applied in design of electron-optical system
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Abstract
It is well known that the structure of electron optical system is complicated, so many factors, such as magnification, geometrical aberrations, and space charge effect must be taken into account in the design. At present, the main work of electron optical system CAD is solving equations and calculating numerical values. However, the designs perhaps need more inference and expertise than numerical calculations. In this paper, a primary expert system which is applied in design of electron optical system is established. This expert system is combined with the simulation software SEU-3D program to design some practical electron optical systems. Although the knowledge base is small and rules are not abundant, this paper has used this system to obtain some very useful results. The initial success with this system suggests that further work need to be done whether more rules and knowledge will be added to extend the ability of expert system.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Lei, Linsu Tong, "Primary expert system applied in design of electron-optical system", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221570; https://doi.org/10.1117/12.221570
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