Translator Disclaimer
25 September 1995 Use of two focusing modes on two-lens focused ion-beam column
Author Affiliations +
On focused ion beam (FIB) milling there is a demand for FIBs of high current densities in wide diameter range for high-speed milling with good positional accuracy. There is also a demand for extremely fine FIBs to form scanning ion microscope images with high resolution. Coarse guidelines in designing the two-lens FIB column are obtained from a locus of the characteristic point on beam diameter vs. beam current (d - Ip) curve in logarithmic scale. Here, the characteristic point is the intersection of two lines corresponding to d equals the Gaussian beam spot and d equals the chromatic aberration's spot. The coarse design shows that two focusing modes on the two-lens column is answerable to their demands. The representative FIB specifications of two focusing modes are also described.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tohru Ishitani and Y. Kawanami "Use of two focusing modes on two-lens focused ion-beam column", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995);


3D integral microscopy based in far-field detection
Proceedings of SPIE (June 19 2018)
Are photonic nanojets achromatic?
Proceedings of SPIE (March 04 2019)
Device metrology with high-performance scanning ion beams
Proceedings of SPIE (April 05 2007)
High resolution imaging with TM<sub>01</sub> laser beams
Proceedings of SPIE (August 12 2008)
High resolution imaging with TM01 laser beams
Proceedings of SPIE (August 04 2009)

Back to Top