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25 September 1995 Use of two focusing modes on two-lens focused ion-beam column
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Abstract
On focused ion beam (FIB) milling there is a demand for FIBs of high current densities in wide diameter range for high-speed milling with good positional accuracy. There is also a demand for extremely fine FIBs to form scanning ion microscope images with high resolution. Coarse guidelines in designing the two-lens FIB column are obtained from a locus of the characteristic point on beam diameter vs. beam current (d - Ip) curve in logarithmic scale. Here, the characteristic point is the intersection of two lines corresponding to d equals the Gaussian beam spot and d equals the chromatic aberration's spot. The coarse design shows that two focusing modes on the two-lens column is answerable to their demands. The representative FIB specifications of two focusing modes are also described.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tohru Ishitani and Y. Kawanami "Use of two focusing modes on two-lens focused ion-beam column", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221592
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