18 September 1995 Debris-free soft x-ray generation using a liquid droplet laser-plasma target
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Abstract
We describe the use of small liquid droplets as target for laser-plasma soft x-ray and EUV generation. Using a table-top laser, this < 15 micrometers diameter plasma source typically produces line radiation with approximately 1(DOT)1012 photons/ster-line-pulse in the water-window wavelength range. The major adcvantages of the source is that it is practically debris free. We discuss applications of the source to soft x-ray microscopy and lithography.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hans M. Hertz, Lars Rymell, Magnus Berglund, Lars Malmqvist, "Debris-free soft x-ray generation using a liquid droplet laser-plasma target", Proc. SPIE 2523, Applications of Laser Plasma Radiation II, (18 September 1995); doi: 10.1117/12.221000; https://doi.org/10.1117/12.221000
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KEYWORDS
X-rays

Liquids

Plasma

Optical filters

Bioalcohols

Extreme ultraviolet

Lithography

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