18 September 1995 Debris-free soft x-ray generation using a liquid droplet laser-plasma target
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We describe the use of small liquid droplets as target for laser-plasma soft x-ray and EUV generation. Using a table-top laser, this < 15 micrometers diameter plasma source typically produces line radiation with approximately 1(DOT)1012 photons/ster-line-pulse in the water-window wavelength range. The major adcvantages of the source is that it is practically debris free. We discuss applications of the source to soft x-ray microscopy and lithography.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hans M. Hertz, Hans M. Hertz, Lars Rymell, Lars Rymell, Magnus Berglund, Magnus Berglund, Lars Malmqvist, Lars Malmqvist, } "Debris-free soft x-ray generation using a liquid droplet laser-plasma target", Proc. SPIE 2523, Applications of Laser Plasma Radiation II, (18 September 1995); doi: 10.1117/12.221000; https://doi.org/10.1117/12.221000


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