15 September 1995 Vacuum ultraviolet optical microscopy
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Abstract
Microscopy using vacuum ultraviolet and soft x-ray radiation offers high resolution, high contrast, and chemical sensitivity. Holography and contact printing are unique in their potential to achieve wavelength-limited resolution because they eliminate optical elements and their imperfections. Both methods, however, lack magnification and require high resolution films and methods to recover images. We present our results on source development and film characterization.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James F. Young, James F. Young, H. M. Duiker, H. M. Duiker, I. Ferincz, I. Ferincz, Tasshi Dennis, Tasshi Dennis, } "Vacuum ultraviolet optical microscopy", Proc. SPIE 2524, National Science Foundation (NSF) Forum on Optical Science and Engineering, (15 September 1995); doi: 10.1117/12.219574; https://doi.org/10.1117/12.219574
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