22 September 1995 Silicon integrated optical pressure sensor based on distributed Bragg reflector structure
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Abstract
A novel integrated optical pressure sensor based on a distributed Bragg reflector structure was designed and simulated. The wavelength-selective device consists of AJ4 shifted distributed Bragg reflectors defined into the glass rib waveguide and a thin diaphragm anisotropically etched into the silicon substrate beneath the region between the reflectors. Pressure sensing is achieved through the detection of the light intensity change induced by the diaphragm deflection. The multilayered diaphragm structure was simulated by using an improved model and the finite-difference method. The effective index method was utilized for designing the rib waveguide. Numerical results revealed that a 1440 .tm long device presents 19.5 dB of extinction ratio with an insertion loss of 3.6 dB for TM polarization and an applied pressure difference of 1 .8 atm. Tenfold length reduction is achieved with the proposed device in relation to the interferometric sensors. The device can also be operated in tandem which is suitable for applications in wavelength division multiplexing sensor networks. Keywords: integrated optical sensors, distributed Bragg reflector, pressure sensors, silicon based sensors.
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Milson Tadeu Camargo Silva, Milson Tadeu Camargo Silva, Stilante Koch Manfrin, Stilante Koch Manfrin, } "Silicon integrated optical pressure sensor based on distributed Bragg reflector structure", Proc. SPIE 2532, Application and Theory of Periodic Structures, (22 September 1995); doi: 10.1117/12.221970; https://doi.org/10.1117/12.221970
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