8 September 1995 Absolute interferometric calibration of cylindrical surfaces: experiments
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Abstract
Two methods of calibrating an interferometer for testing cylindrical surfaces are tested experimentally. One method uses a tilting mirror instead of the test specimen and combines at least two measurements at different angles. The other method adds together three measurements. In two of them a cylindrical specifmen is used. In the third one the specimen is replaced by a roof mirror. Results of both methods are computed. They show a reproducibility of (lambda) /50 and an accuracy of (lambda) /20 for the absolute surface deviations of a cylindrical specimen.
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Karl-Edmund Elssner, Karl-Edmund Elssner, Thomas Bluemel, Thomas Bluemel, Regina Burow, Regina Burow, Ricarda Kafka, Ricarda Kafka, Guenter Schulz, Guenter Schulz, Andreas Vogel, Andreas Vogel, } "Absolute interferometric calibration of cylindrical surfaces: experiments", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218462; https://doi.org/10.1117/12.218462
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