8 September 1995 Analysis of the fundamental measuring error of aspherical surface by shearing interferometer
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Abstract
In the methods to test an asperhical optical surface, sheering interferometer is a testing instrument by which the wavefront of the surface testing is split apart into two and then interference fringes can be formed without demanding a standard reference aspherical wavefront. However, if the sheering interferometer is applied to test an aspehrical surface, having a relatively big deviation from its best fit spherical surface, the fundamental measuring error will increase very quickly. A comprehensive analysis of this error is given and an improved method is put forward by which the testing scale of the sheering interferometer is enlarged by introducing an analogue standard wavefront produced by a computer so as to reduce error resources and to improve the testing accuracy.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiming Xin, Qiming Xin, Yun Gao, Yun Gao, Yuanhui Zeng, Yuanhui Zeng, } "Analysis of the fundamental measuring error of aspherical surface by shearing interferometer", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218417; https://doi.org/10.1117/12.218417
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