8 September 1995 Manufacture and calibration of optical supersmooth roughness artifacts for intercomparisons
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Abstract
Intercomparison roughness measurements have been carried out on supersmooth artifacts fabricated from BK7, fused silica, and Zerodur. The surface parameters were determined using the optical heterodyne profiler Z5500 (Zygo), a special prototype of the mechanical profiler Nanostep (Rank Taylor Hobson), and an Atomic Force Microscope (Park Scientific Instruments) with an improved acquisition technique. The intercomparison was performed after the range of collected spatial wavelengths for each instrument was adjusted using digital filtering techniques. It is demonstrated for different roughness ranges that the applied superpolishing techniques yield supersmooth artifacts which can be used for more intercomparisons. More than 100 samples were investigated. Criteria were developed to select artifacts from the sample stock.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gabriele A. Ringel, Frank Kratz, Dirk-Roger Schmitt, Juergen Mangelsdorf, Francois Creuzet, John D. Garratt, "Manufacture and calibration of optical supersmooth roughness artifacts for intercomparisons", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218438; https://doi.org/10.1117/12.218438
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