8 September 1995 Swing-arm profilometry of aspherics
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Abstract
A profilometer is described that utilizes the swing-arm geometry to provide surface profile measurements of large, highly aspheric surfaces. The profilometer measurement is shown to be robust against stiffness and alignment induced errors in the probe motion.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David S. Anderson, David S. Anderson, James H. Burge, James H. Burge, } "Swing-arm profilometry of aspherics", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218421; https://doi.org/10.1117/12.218421
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