PROCEEDINGS VOLUME 2541
SPIE'S 1995 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION | 9-14 JULY 1995
Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries
Editor(s): John C. Stover
IN THIS VOLUME

3 Sessions, 19 Papers, 0 Presentations
SPIE'S 1995 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION
9-14 July 1995
San Diego, CA, United States
Surface Scatter
Proc. SPIE 2541, Optical scattering enhanced by silicon micromachined surfaces, 0000 (1 September 1995); doi: 10.1117/12.218323
Proc. SPIE 2541, Variable BRDF reference material, 0000 (1 September 1995); doi: 10.1117/12.218332
Proc. SPIE 2541, TIS uniformity maps of wafers, disks, and other samples, 0000 (1 September 1995); doi: 10.1117/12.218336
Proc. SPIE 2541, How scattering kills specular reflectance, 0000 (1 September 1995); doi: 10.1117/12.218337
Proc. SPIE 2541, Roughness measurement of dielectrics with light scatter, 0000 (1 September 1995); doi: 10.1117/12.218338
Proc. SPIE 2541, Enhanced backscattering from very smooth metal surfaces, 0000 (1 September 1995); doi: 10.1117/12.218339
Proc. SPIE 2541, Scattering effects of machined optical surfaces, 0000 (1 September 1995); doi: 10.1117/12.218340
Theory and Analysis
Proc. SPIE 2541, Application of optical scattering in multichip module processing, 0000 (1 September 1995); doi: 10.1117/12.218341
Proc. SPIE 2541, Anomalous optical scattering from intersecting fine particles, 0000 (1 September 1995); doi: 10.1117/12.218324
Proc. SPIE 2541, Light scattering from non-Gaussian surfaces, 0000 (1 September 1995); doi: 10.1117/12.218325
Proc. SPIE 2541, Multiple particle technique for determination of differential scattering cross-section of very small surface bound particles, 0000 (1 September 1995); doi: 10.1117/12.218326
Proc. SPIE 2541, Detection of inherent and laser-induced scatter in optical materials, 0000 (1 September 1995); doi: 10.1117/12.218327
Proc. SPIE 2541, Optical scatter as a diagnostic tool for studying bulk defects which cause laser damage in conventional and rapid-growth KDP and DKDP, 0000 (1 September 1995); doi: 10.1117/12.218328
Proc. SPIE 2541, Angular scattering measurements and calculations of rough spherically shaped carbon particles, 0000 (1 September 1995); doi: 10.1117/12.218329
Instrumentation
Proc. SPIE 2541, Instrumentation for the determination of material properties from spectroscopic measurements of total integrated scatter, 0000 (1 September 1995); doi: 10.1117/12.218330
Proc. SPIE 2541, Two portable devices for the measurement of scatter of a laser beam and evaluation of the scattering materials' Vos function, 0000 (1 September 1995); doi: 10.1117/12.218331
Proc. SPIE 2541, Is there any significant correlation between roughness and scattering near the Rayleigh limit?, 0000 (1 September 1995); doi: 10.1117/12.218333
Proc. SPIE 2541, Optoelectronic scanning device for the observation of scattering of YAG laser light in semiconductor materials, 0000 (1 September 1995); doi: 10.1117/12.218334
Proc. SPIE 2541, Extreme ultraviolet scatter from particulate contaminated mirrors, 0000 (1 September 1995); doi: 10.1117/12.218335
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