1 September 1995 Is there any significant correlation between roughness and scattering near the Rayleigh limit?
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Abstract
Near or even beyond the Rayleigh-limit it is not possible to compute the surface PSD analytically. Since stray light measurements are an affordable approach for quality control in industry it has to be investigated, in which case they can be applied. Therefore a statistical method is proposed to determine, whether there is a significant correlation between roughness and scattering, or not. The method is proposed to determine, whether there is a significant correlation between roughness and scattering, or not. The method is tested with a newly developed rugged stray light sensor, several samples, and comparative measurements with an optical profiler.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hendrik Rothe, Andre Kasper, "Is there any significant correlation between roughness and scattering near the Rayleigh limit?", Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); doi: 10.1117/12.218333; https://doi.org/10.1117/12.218333
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