6 September 1995 Laser instrument for straightness measurements
Author Affiliations +
Abstract
A laser instrument for straightness and alignment measurements with the sliding reflector is described. The instrument provides straightness testing with accuracy of 2im/m at the smoothing time of 3 s.A new method of suppression of the disturbance caused by air turbulence is suggested.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lev N. Butenko, Lev N. Butenko, Ilya Sh. Etsin, Ilya Sh. Etsin, "Laser instrument for straightness measurements", Proc. SPIE 2542, Optomechanical and Precision Instrument Design, (6 September 1995); doi: 10.1117/12.218656; https://doi.org/10.1117/12.218656
PROCEEDINGS
4 PAGES


SHARE
RELATED CONTENT

Improved straightness interferometer for nanometrology
Proceedings of SPIE (February 09 2005)
Laser interferometry gray decision-making model
Proceedings of SPIE (September 01 2003)
In-process laser beam position sensing
Proceedings of SPIE (September 30 1991)
Hyperacuity laser printer
Proceedings of SPIE (June 17 1993)

Back to Top