A novel integrated silicon micro-mechanical/optical pressure sensor is presented. Using the standard IC process and the silicon anisotropic etching technology, an optical strip waveguide which functions as the pressure-sensing and optical signal transmitting element, a thin silicon membrane layer and a photoelectric detector are all integrated on a three-dimensional silicon wafer. The sensor's structure, principle of operation, fabrication processes and test results are presented. This novel silicon integrated micro-mechanical/optical pressure sensor which is small, reliable, sensitive, inexpensive and does not need an external electrical supply may have many potential applications.
Keywords: pressure sensor, micro-mechanical, thin silicon membrane, optical strip waveguide, anisotropic etching