Several designs for ultrahigh-resolution optical positioning components

Jianqiang Zhu

doi:10.1117/12.218665

6 September 1995 Several designs for ultrahigh-resolution optical positioning components

Jianqiang Zhu

Proceedings Volume 2542, Optomechanical and Precision Instrument Design; (1995) https://doi.org/10.1117/12.218665
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

In this paper, some design criteria and key points on ultrahigh resolusion positioning corn ponents were discussed, and the material selection for different functional elements were studied in detail. Several typical and special design were advanced with figues illustration.

Citation Download Citation

Jianqiang Zhu "Several designs for ultrahigh-resolution optical positioning components", Proc. SPIE 2542, Optomechanical and Precision Instrument Design, (6 September 1995); https://doi.org/10.1117/12.218665

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