Noninvasive thermal imaging of GaAs MESFETs

M. de Boer; Hans Winkel; J. Verduyn; Frank L. M. van den Bogaart; Jan S. de Vries

doi:10.1117/12.218270

8 September 1995 Noninvasive thermal imaging of GaAs MESFETs

M. de Boer, Hans Winkel, J. Verduyn, Frank L. M. van den Bogaart, Jan S. de Vries

Proceedings Volume 2552, Infrared Technology XXI; (1995) https://doi.org/10.1117/12.218270
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

We demonstrate the use of an infrared focal plane array (IR-FPA) to measure the spatially resolved surface temperature of a GaAs MESFET (gallium arsenide metal-semiconductor field-effect transistor) under dc and rf operating conditions. By compensating for variations of the small emissivity, absolute temperatures of plus or minus 5 degrees Celsius, and small temperature differences of 1 degree Celsius can be determined. By deconvolution of the lens MTF (modulation transfer function) we attain a resolution of 6.25 micrometer. The combination of thermal and spatial sensitivity makes our set-up ideally suited for non- destructive characterization of semiconductor devices.

Citation Download Citation

M. de Boer, Hans Winkel, J. Verduyn, Frank L. M. van den Bogaart, and Jan S. de Vries "Noninvasive thermal imaging of GaAs MESFETs", Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); https://doi.org/10.1117/12.218270

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available