Semiconductor film bolometer technology for uncooled IR sensors

Mark H. Unewisse; Kevin Charles Liddiard; Brian I. Craig; Stephen J. Passmore; Rodney J. Watson; Robert E. Clarke; Olaf Reinhold

doi:10.1117/12.218278

8 September 1995 Semiconductor film bolometer technology for uncooled IR sensors

Mark H. Unewisse, Kevin Charles Liddiard, Brian I. Craig, Stephen J. Passmore, Rodney J. Watson, Robert E. Clarke, Olaf Reinhold

Author Affiliations +

Proceedings Volume 2552, Infrared Technology XXI; (1995) https://doi.org/10.1117/12.218278
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

This paper presents an overview of the research program on uncooled IR sensitive bolometer technology at the Defence Science and Technology Organisation (DSTO). It covers the design, materials growth, and performance of semiconductor film bolometer (SFB) IR detectors, with a strong emphasis on the practical considerations involved in their production. The overview includes a discussion of thermal isolation and the effects that vacuum packaging, and other alternative technologies, have on the performance of the detectors. Some of the principal applications of uncooled SFB IR detectors are also discussed. Finally, current technological developments in the DSTO uncooled sensor program and the direction of future research are described.

Citation Download Citation

Mark H. Unewisse, Kevin Charles Liddiard, Brian I. Craig, Stephen J. Passmore, Rodney J. Watson, Robert E. Clarke, and Olaf Reinhold "Semiconductor film bolometer technology for uncooled IR sensors", Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); https://doi.org/10.1117/12.218278

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