Iso-VPE growth of Hg1-xCdxTe on hybrid substrates

Sergio Bernardi

doi:10.1117/12.218182

1 September 1995 Iso-VPE growth of Hg_1-xCd_xTe on hybrid substrates

Sergio Bernardi

Proceedings Volume 2554, Growth and Characterization of Materials for Infrared Detectors II; (1995) https://doi.org/10.1117/12.218182
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

High quality 2 inch Hg_1-xCd_xTe/Sapphire structures are grown by an isothermal vapor phase epitaxy process starting from MOCVD CdTe/Sapphire hybrid substrates. HgTe growth and CdTe/HgTe solid state interdiffusion processes produce the transformation of the starting CdTe layer into a compositionally controlled Hg_1-xCd_xTe film on the inert base sapphire substrate grown. By using experimental growth conditions involving HgTe/CdTe interdiffusion rates higher than HgTe growth rates, in depth compositionally uniform Hg_1-xCd_xTe films can be obtained in a really simple one-step process. A 2-zone open tube vertical reactor improved for 2 inch wafers has been used for the present process, making it very attractive for manufacturing purposes. Morphological, optical, electrical, and structural characteristics of the iso-VPE mercury cadmium telluride on sapphire structures are reported witnessing their technological power as infrared materials.

Citation Download Citation

Sergio Bernardi "Iso-VPE growth of Hg_1-xCd_xTe on hybrid substrates", Proc. SPIE 2554, Growth and Characterization of Materials for Infrared Detectors II, (1 September 1995); https://doi.org/10.1117/12.218182

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