2 August 1995 Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect
Author Affiliations +
Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215626
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Abstract
In this work, the phase evaluation of multiple-beam Fizeau interferograms is carried out by the usual phase-stepping algorithms by superimposing the interferogram on a Ronchi grid located at the interferometer image plane. The phase modulation, required for phase measurement, is obtained by translating the grid in its own plane, while a slight defocusing in the image acquisition system provides a suitable sinusoidal intensity pattern. An estimation of the measurable range of surface slopes is calculated and experiments on a spherical surface have been realized in order to analyze the validity of the obtained results.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Benito Vasquez Dorrio, Benito Vasquez Dorrio, Jesus Blanco-Garcia, Jesus Blanco-Garcia, Angel F. Doval, Angel F. Doval, Jose Carlos Lopez Vazquez, Jose Carlos Lopez Vazquez, R. Soto, R. Soto, J. L. Fernandez, J. L. Fernandez, Mariano Perez-Amor, Mariano Perez-Amor, } "Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215626; https://doi.org/10.1117/12.215626
PROCEEDINGS
15 PAGES


SHARE
Back to Top