2 August 1995 Fabrication and characterization of optical super-smooth surfaces
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Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215614
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Intercomparison roughness measurements have been carried out at supersmooth artefacts fabricated from BK7, fused silica, and Zerodur. The surface parameters were determined using a special prototype of the mechanical profiler Nanostep (Rank Taylor Hobson), the Optical Heterodyne Profiler Z5500 (Zygo), and an Atomic Force Microscope (Park Scientific) with an improved acquisition technique. The intercomparison was performed after the range of collected spatial wavelength for each instrument was adjusted using digital filtering techniques. It is demonstrated for different roughness ranges that are applied superpolishing techniques yield supersmooth artefacts which can be used for more intercomparisons.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dirk-Roger Schmitt, Dirk-Roger Schmitt, Frank Kratz, Frank Kratz, Gabriele A. Ringel, Gabriele A. Ringel, Juergen Mangelsdorf, Juergen Mangelsdorf, Francois Creuzet, Francois Creuzet, John D. Garratt, John D. Garratt, } "Fabrication and characterization of optical super-smooth surfaces", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215614; https://doi.org/10.1117/12.215614

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