2 August 1995 Influence of polishing fluid on ultrasmoothness polishing of Al-Mg alloy plate
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Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215615
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Abstract
In the ultra smoothness polishing of a kind of Al-Mg alloy plate with alumina and colloidal silica abrasives, the influence of the hydrogen exponent of polishing fluids on the removal rate and the smoothness are examined and discussed by polishing in four hydrogen exponent of fluids of pH equals 2.3 (acid), pH equals 7.3 (neutral), pH equals 9.7 (middle alkaline) and pH equals 11.7 (strong alkaline). In case of polishing with alumina abrasives, the acid fluid has better influence on the removal rate and the surface smoothness than the neutral and the alkaline fluid. The removal rate and the smoothness for alumina-polishing in the neutral fluid are extremely small and worse than those before polishing. The best micro-area smoothness obtained by alumina-polishing in the acid fluid is about 13 nm (P-V). In case of polishing with colloidal silica abrasives, the alkaline fluid has better influence on the removal rate but the hydrogen exponent of fluid has little influence on the smoothness. The best micro-area smoothness is about 5 nm (P-V) for silica-polishing but that excluding pits of about 5 nm in depth becomes below 2 nm. In the silica-polishing of pure aluminum plate, the pit is not formed on the polished surface.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Heiji Yasui, Heiji Yasui, Ryuji Matsunaga, Ryuji Matsunaga, Hisashi Inao, Hisashi Inao, Takeyuki Kobayashi, Takeyuki Kobayashi, Akira Hosokawa, Akira Hosokawa, } "Influence of polishing fluid on ultrasmoothness polishing of Al-Mg alloy plate", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215615; https://doi.org/10.1117/12.215615
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