2 August 1995 Optical approach for LCD inspection
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Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215582
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Optical inspection technology is very fundamental for TFT (thin film transistor) array and cell processes of the LCD (liquid crystal display) manufacturing which is utilized in IQC (in-line quality control) process. This paper describes a general overview about LCD inspection items and our requirements, and show some optical technology for those inspection items.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shigeki Terada, Shigeki Terada, Yasuo Shono, Yasuo Shono, } "Optical approach for LCD inspection", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215582; https://doi.org/10.1117/12.215582

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