2 August 1995 Optical metrology for small zone measurement
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Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215625
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Abstract
A novel technique in optical metrology is developed for small zone measurement. The technique consists of a double lenses optical arrangement and an improved digital speckle correlation technique. This new method provides the possibility of high sensitivity for deformation measurements. A theoretical analysis and an experimental result confirmed that a 2 nm resolution can be realized. Some application examples are presented in the paper.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guan-chang Jin, Guan-chang Jin, Nai-Keng Bao, Nai-Keng Bao, Po Sheun Chung, Po Sheun Chung, } "Optical metrology for small zone measurement", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); doi: 10.1117/12.215625; https://doi.org/10.1117/12.215625
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