Straightness measurement using laser beam straight datum

Junichi Uchikoshi; Shoichi Shimada; Naoya Ikawa; Akio Komura

doi:10.1117/12.215602

2 August 1995 Straightness measurement using laser beam straight datum

Junichi Uchikoshi, Shoichi Shimada, Naoya Ikawa, Akio Komura

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215602
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

Using the direction stabilized laser beam as a physical straight datum, instead of the tangible reference surface, a method is proposed for the measurement of an error motion of a slide table and/or surface profile of mechanical components. A specially designed 2D position sensor/compensator for laser beam center is developed combining a quadrant photo-diode (QPD) position sensor for beam center and the piezo-compensator which compensates the beam shift from the center of QPD. By the use the sensor/compensator proposed, the positional and angular fluctuations of laser beam path is evaluated with nanometric resolution. Combining the sensor with the piezo-driven mirror compensator, the directional stabilizer for the laser beam is also designed in the same manner as the sensor/compensator. The stabilized He-Ne laser beam can be used as the metrological datum of straightness within the accuracy of 2 X 10 -8 rad. By mounting the position sensor/compensator on a slide table, the carriage with working distance of 1 m is so designed and built as to move straight along the stabilized laser beam. The carriage can be used as a mechanical straight datum with the accuracy equivalent to the laser beam stability.

Citation Download Citation

Junichi Uchikoshi, Shoichi Shimada, Naoya Ikawa, and Akio Komura "Straightness measurement using laser beam straight datum", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215602

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