Paper
27 July 1995 Diffractive optical elements: fabrication and measurement of a wavelength division demultiplexer
Author Affiliations +
Proceedings Volume 2577, International Conference on Applications of Optical Holography; (1995) https://doi.org/10.1117/12.215311
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Abstract
A new type of wavelength division demultiplexer (DEMUX), which consists of a pair of diffractive optical elements integrated on one substrate, is presented. The 3 dB-resolution of the DEMUX is about 2 nm and the measured losses are about -3.5 db at 1.55-micrometers wavelength. To simplify the fabrication process of the integrated diffractive optical elements, a new 3D structure replication technique is proposed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edgar Pawlowski "Diffractive optical elements: fabrication and measurement of a wavelength division demultiplexer", Proc. SPIE 2577, International Conference on Applications of Optical Holography, (27 July 1995); https://doi.org/10.1117/12.215311
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KEYWORDS
Diffractive optical elements

Diffraction

Demultiplexers

Silicon

Photomasks

Fabrication

Transmittance

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