27 July 1995 Diffractive optical elements for making CO2 laser material processing
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Proceedings Volume 2577, International Conference on Applications of Optical Holography; (1995); doi: 10.1117/12.215314
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Abstract
In this paper, a kind of diffractive optical element (DOE) was designed and fabricated. For the design, an improved Gerchberg-Saxton algorithm and an approach of aperture division are presented. The DOE was generated by means of photolithogrpahy and ion etching techniques with 16 phase levels. The experimental results of quenching processing of steel parts by inserting the DOE into CO2 laser beam are satisfactory. The DOE is of an advantage of that applicable to a variety of multimode laser beams.
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Yansong Chen, Dehuan Li, Xiao Ming Cui, "Diffractive optical elements for making CO2 laser material processing", Proc. SPIE 2577, International Conference on Applications of Optical Holography, (27 July 1995); doi: 10.1117/12.215314; https://doi.org/10.1117/12.215314
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KEYWORDS
Diffractive optical elements

Carbon dioxide lasers

Beam shaping

Objectives

Materials processing

Etching

Ions

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