18 December 1995 Design of a micromachined pressure sensor for endoscopic graspers
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Proceedings Volume 2593, Microrobotics and Micromechanical Systems; (1995) https://doi.org/10.1117/12.228637
Event: Photonics East '95, 1995, Philadelphia, PA, United States
Abstract
A micromachined pressure sensor that is suitable for integrating on the tip of the grasper of an endoscopic surgical instrument is presented. Device operation to detect the pressure applied on the body tissues during endoscopic surgery is based on the change in the capacitance between a 5 micrometers thin boron doped silicon membrane and 1 micrometers thick Aluminium electrodes sputtered inside 15 micrometers deep cavities etched in glass. The design, structural optimization for obtaining high sensitivity and the fabrication process for the device are presented. The device has a peak sensitivity of 500 pFmm2/N. The range of the pressure sensor is from 0.01 N/mm2 up to 0.1 N/mm2 which is suitable for measuring the pressure on various tissues inside the body during endoscopic surgery. Since the device simulates the teeth like surface of the existing grasper it is possible to integrate the device on the tip of the grasper of the endoscopic surgical instrument.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Manish Mehta, Manish Mehta, M. Parameswaran, M. Parameswaran, Shahram Payandeh, Shahram Payandeh, } "Design of a micromachined pressure sensor for endoscopic graspers", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); doi: 10.1117/12.228637; https://doi.org/10.1117/12.228637
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