This paper presents a high-voltage generator circuit as power supply for an electrostatic micromotor with process integration based on a standard 2 micrometers CMOS technology. This voltage multiplier circuit utilizes n-type with in a standard 2 micrometers CMOS process as a vital innovation to achieve electrically isolated and floated diodes. This design secures a high- voltage output limited only by the breakdown voltage of n-well to p-substrate pn junctions. For the purpose we used, the power supply can provide approximately 50 V dc output by inputting 5 V dc power and two non-overlapping 0/5 V clock signals. The demonstrated design has application in microbiotic and microactuated systems.
William N. Carr,
"Micropower supply for electrostatic micromotors", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); doi: 10.1117/12.228648; https://doi.org/10.1117/12.228648