18 December 1995 Micropower supply for electrostatic micromotors
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Proceedings Volume 2593, Microrobotics and Micromechanical Systems; (1995) https://doi.org/10.1117/12.228648
Event: Photonics East '95, 1995, Philadelphia, PA, United States
Abstract
This paper presents a high-voltage generator circuit as power supply for an electrostatic micromotor with process integration based on a standard 2 micrometers CMOS technology. This voltage multiplier circuit utilizes n-type with in a standard 2 micrometers CMOS process as a vital innovation to achieve electrically isolated and floated diodes. This design secures a high- voltage output limited only by the breakdown voltage of n-well to p-substrate pn junctions. For the purpose we used, the power supply can provide approximately 50 V dc output by inputting 5 V dc power and two non-overlapping 0/5 V clock signals. The demonstrated design has application in microbiotic and microactuated systems.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William N. Carr, William N. Carr, Hong Jiang, Hong Jiang, } "Micropower supply for electrostatic micromotors", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); doi: 10.1117/12.228648; https://doi.org/10.1117/12.228648
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