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18 December 1995 Micropower supply for electrostatic micromotors
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Proceedings Volume 2593, Microrobotics and Micromechanical Systems; (1995)
Event: Photonics East '95, 1995, Philadelphia, PA, United States
This paper presents a high-voltage generator circuit as power supply for an electrostatic micromotor with process integration based on a standard 2 micrometers CMOS technology. This voltage multiplier circuit utilizes n-type with in a standard 2 micrometers CMOS process as a vital innovation to achieve electrically isolated and floated diodes. This design secures a high- voltage output limited only by the breakdown voltage of n-well to p-substrate pn junctions. For the purpose we used, the power supply can provide approximately 50 V dc output by inputting 5 V dc power and two non-overlapping 0/5 V clock signals. The demonstrated design has application in microbiotic and microactuated systems.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William N. Carr and Hong Jiang "Micropower supply for electrostatic micromotors", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); doi: 10.1117/12.228648;


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