19 January 1996 Determination of the roughness profile amplitude and wavelength: a facet model approach
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Scattering techniques are mostly used to investigate rough surfaces with rms values less than lambda 'the wavelength of the illumination beam.' An investigation was made on the scattering of laser light from rough surfaces having amplitudes larger than the wavelength of the illumination beam. A numerical solution of the Beckmann's scattering model, based on the facet model approach, was applied for the assessment of surface roughness. The proposed model was used to calculate the amplitude and wavelength of a number of periodic rough surfaces. A special scattering geometry was adopted in which the illumination beam was parallel to the roughness lay and the grazing angle was small. The numerical investigation included a number of periodic rough surfaces with a wide range of roughness amplitudes. The facet model was also used to calculate the characteristics of the investigated surfaces using their digitized profile coordinates. Numerical results were compared with the results obtained experimentally from real periodically rough surfaces. The facet model approach makes it possible to study wider range of rough surfaces with profiles that do not follow a defined mathematical form. Experimental results show a very good agreement with those obtained from the numerical solution using the facet model approach.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mohammad A. Younes, Mohammad A. Younes, } "Determination of the roughness profile amplitude and wavelength: a facet model approach", Proc. SPIE 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology, (19 January 1996); doi: 10.1117/12.230379; https://doi.org/10.1117/12.230379

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