27 December 1995 Flip-chip optical fiber attachment to a monolithic optical receiver chip
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Abstract
We report on manufacturable, low cost scheme for precision packaging a monolithically integrated GaAs optical receiver. Silicon V-groove and flip-chip bonding technologies are used to reliably achieve the required alignment accuracy. A silicon fiber carrier, which houses the fiber in a V-groove, is flip-chip bonded on to the receiver chip. The light from the cleaved end of the fiber is reflected off the V-groove end on to the planar photodetector, with an optical coupling efficiency of 85%. The entire fiber attach process uses standard semiconductor fabrication and processing techniques, making it attractive for low cost manufacturing.
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Vijayanand Vusirikala, Vijayanand Vusirikala, Peter J.S. Heim, Peter J.S. Heim, Mario Dagenais, Mario Dagenais, C. Philip McClay, C. Philip McClay, } "Flip-chip optical fiber attachment to a monolithic optical receiver chip", Proc. SPIE 2613, Emerging Components and Technologies for All-Optical Networks, (27 December 1995); doi: 10.1117/12.228877; https://doi.org/10.1117/12.228877
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