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18 August 1995 Capabilities of existing optical laser pattern generator for large area micro images
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Proceedings Volume 2622, Optical Engineering Midwest '95; (1995) https://doi.org/10.1117/12.216798
Event: Optical Engineering Midwest '95, 1995, Chicago, IL, United States
Abstract
This paper addresses the materials, processes, and equipment required for large area micro pattern generation as used in the fabrication of display devices. We will point out some of the processing problems in obtaining zero defect patterns and the types of equipment available to obtain the desired result. We will define large area micro images as patterns generated on substrates larger than 8 by 8 inches, having geometries smaller than 0.008 inches.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Manfred K. Stelter "Capabilities of existing optical laser pattern generator for large area micro images", Proc. SPIE 2622, Optical Engineering Midwest '95, (18 August 1995); https://doi.org/10.1117/12.216798
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