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30 June 1995 Integrated transducer systems
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Proceedings Volume 2634, Optoelectronic and Electronic Sensors; (1995) https://doi.org/10.1117/12.213135
Event: Optoelectronic and Electronic Sensors, 1994, Warsaw-Zegrze, Poland
Abstract
In the paper we discuss possible solutions to problems pertaining the implementation of integrated transducer systems, based on examples of WSI image transducers, magnetic field sensors and tactile sensors arrays, as well as arrays of chemical sensors. We also present the issues common to large area transducer arrays, such as building-in redundancy into WSI transducer arrays, and frequency domain circuits for the future communication pathway in integrated transducer systems. Advantages of standard CMOS technology, enhanced with various post-fabrication processes such as silicon micromachining and laser linking, are also stressed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marek Syrzycki, M. Parameswaran, and Glenn H. Chapman "Integrated transducer systems", Proc. SPIE 2634, Optoelectronic and Electronic Sensors, (30 June 1995); https://doi.org/10.1117/12.213135
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