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Correlation between space charge created by Fowler-Nordheim electron injections and charge to breakdown (QBD) of gate oxides in MOS capacitors: modeling and experiment
Highly reliable CVD-stacked oxynitride gate dielectric fabricated by in-situ rapid thermal multiprocessing
Process design for manufacturability of GaAs MESFET integrated circuit using statistical experimental design techniques
In-situ Si wafer temperature measuring using pulse-modulated infrared laser interferometric thermometry for CVD film deposition
Degradation of thin Si02 sidewall spacers during selective epitaxial growth for the fabrication of raised source/drain MOSFETs